The elastic deformation of the sealing ring under high parameter conditions will affect the sealing performance to a certain extent.Considering cavitation effect and elastic deformation,the liquid leakage characteristics of high-speed waviness face mechanical seal were studied theoretically.The pressure distribution,opening force,and leakage of the seal were numerically solved by finite difference method,and the influence of geometrical parameters of waviness amplitude and operating parameters such as rotational speed,sealing pressure,and film thickness on opening force and leakage rate was analyzed.The results show that the bearing capacity of the seal face decreases due to the cavitation and deformation of the seal face at high speed.Furthermore,when the waviness amplitude is small,the opening force considering elastic deformation is larger than that without elastic deformation.When the waviness amplitude is greater than 0.2 μm,the results are opposite.But the leakage rate considering elastic deformation is always higher than that without elastic deformation.In addition,under the influence of elastic deformation,the sealing performance of waviness face mechanical seal is mainly affected by sealing pressure and seal clearance.With the increase of sealing pressure,the leakage rate increases.With the increase of seal clearance,the difference of leakage rate before and after considering elastic deformation decreases gradually.Under the calculated conditions,the elastic deformation could contribute to an increase in leakage rate of more than 50%.