In order to explore the mechanism of V element improving the tribological properties of TaN films,a high-vacuum magnetron sputtering system was used to prepare TaVN films with different V contents on 304 stainless steel and single crystal Si wafer.The X-ray diffractometer (XRD),the scanning electron microscope (SEM),the microhardness tester and the surface property tester were used to analyze and characterize the structure and properties of TaVN films.The results show that the TaVN film exhibits a face-centered cubic structure,and the TaVN films with different V contents have a preferred orientation on the (111) crystal plane.With the increase of V contents,the (111) crystal plane shifts to the right.The surfaces of the TaVN films are smooth and flat,without porosity.The interface between the film layer and the substrate is clear,and the cross-section of TaVN film shows columnar structure.With the increase of V content,the hardness of the TaVN films firstly increases and then decreases.The hardness of TaVN film with 15% V content in TaV target reaches the maximum value.With the increase of V content,the friction coefficient of TaVN film decreases.The reason is that V element is oxidized to form self-lubricating Magnéli phase V2O5 during the friction process.With the increase of V content,the wear mechanism of TaVN films changes from abrasive wear,adhesive wear and oxidative wear to abrasive wear and oxidative wear.