Abstract:The diamondlike carbon (DLC) films were prepared on the surface of 304 stainless steel by plasma enhanced chemical vapor deposition (PECVD) technique with varying pulse bias voltages.The surface roughness,the crosssectional morphology,the structure and composition of the films were characterized by surface profilometer,scanning electron microscopy,Raman spectrum and electron probe,respectively.The hardness and elastic modulus of the films were tested on a nanoindentor,and the corresponding adhesion forces between the film and substrate were investigated using a scratch tester.The tribological properties of the films were evaluated by a ballondisc tribometer.The results show that the DLC films are successfully prepared by PECVD technique and the applied pulsed bias voltages greatly affect the morphologies,microstructures and mechanical properties of the asprepared DLC films.With the increasing of the bias voltages,the surface roughness,friction coefficient and wear rate of the DLC film are decreased to a minimum value and then start to increase,while the adhesion force between the film and the substrate is increased to a maximum value and then slightly decreased.The film prepared with 20 kV pulse bias voltage exhibits optimal adhesion force to the substrate.However,the film prepared with 16 kV bias voltage shows the smoothest surface and the highest hardness,resulting in superior friction reduction and wear resistance.