Titanium-doped diamond-like carbon (Ti-DLC) films with different content of Ti element were deposited by a hybrid deposition system consisting of direct current (DC) and radio frequency (RF) magnetron sputtering.The effects of Ti contents on the microstructure and mechanical properties of Ti-DLC films were analyzed by SEM,XRD,Raman,nano-indentation and friction testing machine.Tribological property of Ti-DLC films at elevated temperature was discussed.The results show that the proportion of sp3 bond in Ti-DLC films first increases and then decreases with the increase of Ti content due to Ti doping.Ti doping improves the hardness and elastic modulus of Ti-DLC films,and improves the adhesion force of Ti-DLC films to some extent.The friction coefficient and wear rate of Ti-DLC films at room temperature decrease with the increase of Ti content.However,Ti-DLC films has obvious abrasive wear,and the wear rate is slightly higher than DLC film.Ti doping can effectively improve the thermal stability and high temperature tribological properties of DLC films.At 300 ℃,the friction coefficient and wear rate of Ti-doped films are still low.