河北省自然科学基金项目(E2019202367)
田雨暄,王胜利,罗翀,王辰伟,张国林,孙纪元,冯鹏,盛媛慧.单烷基磷酸酯钾盐抑制剂对Co互连化学机械抛光的影响[J].润滑与密封,2024,49(10):84-91.
TIAN Yuxuan, WANG Shengli, LUO Chong, WANG Chenwei, ZHANG Guolin, SUN Jiyuan, FENG Peng, SHENG Yuanhui. The Effect of Potassium Monoalkyl Phosphate Ester Inhibitor on Chemical Mechanical Polishing of Co Interconnects[J]. Lubrication Engineering,2024,49(10):84-91.