国家科技重大专项(2016ZX02301003-004-007);河北省自然科学基金项目(F2022202072;F2018202174)
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WANG Xiaolong, GAO Pengcheng, TAN Baimei, DU Haoyu, WANG Fangyuan. Effect of Cutting Fluid on the Surface Quality of β-Ga2O3 Wafer of Diamond Wire Saw Slicing[J]. Lubrication Engineering,2024,49(3):133-142.