Abstract:In order to meet the design requirements of airbearing table of large stroke raster engraving,the finite element model of gas film was established,and the effects on the gas film characteristics of the airbearings by different layouts of restrictors and pressure groove structures were analyzed with load capacity,gas consumption,and dead zone velocity as the main indexes.The results reveal that the different airbearing structures will cause various pressure characteristics,which will impact the load capacity,gas consumption and dead zone velocity.The structure of 3×3 restrictor and Wangshaped pressure groove can improve the load capacity,eliminate dead zone velocity of the airbearings and increase gas consumption slightly,it can meet the long time working requirements of airbearing table for large stroke raster engraving.